Three-dimensional memory device with source contacts connected by an adhesion layer and methods for forming the same

ABSTRACT

A three-dimensional (3D) memory device includes a memory stack over a substrate. The memory stack includes interleaved a plurality of conductor layers and a plurality of insulating layers. The 3D memory device also includes a plurality of channel structures extending vertically in the memory stack. The 3D memory device further includes a source structure extending in the memory stack. The source structure includes a support structure dividing the source structure into first and second sections. The source structure also includes an adhesion layer. At least a portion of the adhesion layer extends through the support structure and conductively connects the first and second sections.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is continuation of International Application No.PCT/CN2019/103861, filed on Aug. 30, 2019, entitled “THREE-DIMENSIONALMEMORY DEVICE WITH SOURCE CONTACTS CONNECTED BY AN ADHESION LAYER ANDMETHODS FOR FORMING THE SAME.” This application is also related to U.S.application Ser. No. 16/689,513, filed on Nov. 20, 2019, entitled“THREE-DIMENSIONAL MEMORY DEVICE WITH SOURCE CONTACTS CONNECTED BY ANADHESION LAYER AND METHODS FOR FORMING THE SAME,” which is herebyincorporated by reference in its entirety.

BACKGROUND

Embodiments of the present disclosure relate to three-dimensional (3D)memory devices having source structures of reduced resistance, andmethods for forming the 3D memory devices.

Planar memory cells are scaled to smaller sizes by improving processtechnology, circuit design, programming algorithm, and fabricationprocess. However, as feature sizes of the memory cells approach a lowerlimit, planar process and fabrication techniques become challenging andcostly. As a result, memory density for planar memory cells approachesan upper limit.

A 3D memory architecture can address the density limitation in planarmemory cells. 3D memory architecture includes a memory array andperipheral devices for controlling signals to and from the memory array.

SUMMARY

Embodiments of 3D memory devices and methods for forming the 3D memorydevices are provided.

In one example, a 3D memory device includes a memory stack over asubstrate. The memory stack includes interleaved a plurality ofconductor layers and a plurality of insulating layers. The 3D memorydevice also includes a plurality of channel structures extendingvertically in the memory stack. The 3D memory device further includes asource structure extending in the memory stack. The source structureincludes a support structure dividing the source structure into firstand second sections. The source structure also includes an adhesionlayer. At least a portion of the adhesion layer extends through thesupport structure and conductively connects the first and secondsections.

In another example, a 3D memory device includes a memory stack over asubstrate. The memory stack includes interleaved a plurality ofconductor layers and a plurality of insulating layers. The 3D memorydevice also includes a plurality of channel structures extendingvertically in the memory stack. The 3D memory device also includes aplurality of source structures extending in parallel along a lateraldirection in the memory stack. The plurality of source structures eachincludes a plurality of support structures arranged along the lateraldirection and dividing the source structure into a plurality ofsections. Each of the plurality of source structures further includes anadhesion layer. At least a portion of the adhesion layer extends throughat least one of the support structures and conductively connects atleast two adjacent sections divided by the at least one of the supportstructures.

In a further example, a method for forming a 3D memory device includesforming a cut structure in a stack structure. The cut structure includesa sacrificial layer. The method also includes removing portions of thestack structure adjacent to the cut structure to form a slit structureand an initial support structure. The initial support structure dividesthe slit structure into a plurality of slit openings. The method alsoincludes forming an opening in the initial support structure by removingthe sacrificial layer of the cut structure. The method further includesforming a plurality of conductor portions in the initial supportstructure through the plurality of slit openings. The method alsoincludes depositing an adhesion material in the opening of the initialsupport structure. The deposited adhesion material forms at least aportion of an adhesion layer extending through the initial supportstructure. The method also includes filling the opening of the initialsupport structure to form a support structure. In addition, the methodincludes forming a source contact in each of the plurality of slitopenings. At least two source contacts are conductively connected to theadhesion layer.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated herein and form a partof the specification, illustrate embodiments of the present disclosureand, together with the description, further serve to explain theprinciples of the present disclosure and to enable a person skilled inthe pertinent art to make and use the present disclosure.

FIG. 1 illustrates a plan view of an exemplary 3D memory device havingsource contacts connected by an adhesion layer, according to someembodiments of the present disclosure.

FIG. 2A illustrates a cross-sectional view of the 3D memory deviceillustrated in FIG. 1 along the C-D direction, according to someembodiments of the present disclosure.

FIG. 2B illustrates a cross-sectional view of the 3D memory deviceillustrated in FIG. 1 along the A-B direction, according to someembodiments of the present disclosure.

FIG. 3A illustrates a plan view of an exemplary pattern set for formingvarious structures in a fabrication process for forming a 3D memorydevice, according to some embodiments of the present disclosure.

FIG. 3B illustrates an enlarged view of a portion of the pattern setshown in FIG. 3A, according to some embodiments of the presentdisclosure.

FIGS. 4A and 4B illustrate a flowchart of an exemplary fabricationprocess for forming a 3D memory device having source contacts connectedby an adhesion layer, according to some embodiments of the presentdisclosure.

FIGS. 5-19 illustrate cross-sectional views of an exemplary 3D memorydevice at various stages of a fabrication process, according to someembodiments of the present disclosure.

FIG. 20 illustrates a cross-sectional view of an existing 3D memorydevice with deformed gate line slits (GLSs).

Embodiments of the present disclosure will be described with referenceto the accompanying drawings.

DETAILED DESCRIPTION

Although specific configurations and arrangements are discussed, thisshould be understood that this is done for illustrative purposes only. Aperson skilled in the pertinent art will recognize that otherconfigurations and arrangements can be used without departing from thespirit and scope of the present disclosure. It will be apparent to aperson skilled in the pertinent art that the present disclosure can alsobe employed in a variety of other applications.

It is noted that references in the specification to “one embodiment,”“an embodiment,” “an example embodiment,” “some embodiments,” etc.,indicate that the embodiment described may include a particular feature,structure, or characteristic, but every embodiment may not necessarilyinclude the particular feature, structure, or characteristic. Moreover,such phrases do not necessarily refer to the same embodiment. Further,when a particular feature, structure or characteristic is described inconnection with an embodiment, it would be within the knowledge of aperson skilled in the pertinent art to affect such feature, structure orcharacteristic in connection with other embodiments whether or notexplicitly described.

In general, terminology may be understood at least in part from usage incontext. For example, the term “one or more” as used herein, dependingat least in part upon context, may be used to describe any feature,structure, or characteristic in a singular sense or may be used todescribe combinations of features, structures or characteristics in aplural sense. Similarly, terms, such as “a,” “an,” or “the,” again, maybe understood to convey a singular usage or to convey a plural usage,depending at least in part upon context. In addition, the term “basedon” may be understood as not necessarily intended to convey an exclusiveset of factors and may, instead, allow for existence of additionalfactors not necessarily expressly described, again, depending at leastin part on context.

As used herein, the term “nominal/nominally” refers to a desired, ortarget, value of a characteristic or parameter for a component or aprocess operation, set during the design phase of a product or aprocess, together with a range of values above and/or below the desiredvalue. The range of values can be due to slight variations inmanufacturing processes or tolerances. As used herein, the term “about”indicates the value of a given quantity that can vary based on aparticular technology node associated with the subject semiconductordevice. Based on the particular technology node, the term “about” canindicate a value of a given quantity that varies within, for example,10-30% of the value (e.g., ±10%, ±20%, or ±30% of the value).

As used herein, a staircase structure refers to a set of surfaces thatinclude at least two horizontal surfaces (e.g., along x-y plane) and atleast two (e.g., first and second) vertical surfaces (e.g., alongz-axis) such that each horizontal surface is adjoined to a firstvertical surface that extends upward from a first edge of the horizontalsurface, and is adjoined to a second vertical surface that extendsdownward from a second edge of the horizontal surface. A “step” or“staircase” refers to a vertical shift in the height of a set ofadjoined surfaces. In the present disclosure, the term “staircase” andthe term “step” refer to one level of a staircase structure and are usedinterchangeably. In the present disclosure, a horizontal direction canrefer to a direction (e.g., the x-axis or the y-axis) parallel with thetop surface of the substrate (e.g., the substrate that provides thefabrication platform for formation of structures over it), and avertical direction can refer to a direction (e.g., the z-axis)perpendicular to the top surface of the structure.

NAND flash memory devices, widely used in various electronic produces,are non-volatile, light-weighted, of low power consumption and goodperformance. Currently, planar NAND flash memory devices have reachedits storage limit. To further increase the storage capacity and reducethe storage cost per bit, 3D NAND memory devices have been proposed. Anexisting 3D NAND memory device often includes a plurality of memoryblocks. Adjacent memory blocks are often separated by a GLS, in which anarray common source (ACS) is formed. In the fabrication method to formthe existing 3D NAND memory device, due to an increased number of levels(or conductor/insulator pairs), the etching process to form GLSs becomechallenging. For example, GLSs can be more susceptible to deformation,e.g., fluctuation of feature size, causing memory blocks neighboring theGLSs to deform or even collapse. The performance of the 3D NAND memorydevice can be affected.

FIG. 20 illustrates an existing 3D memory device 2000 with deformed GLSsand a deformed memory block. As shown in FIG. 20, a memory stack 2011 isformed over a substrate 2002. A plurality of GLSs, e.g., 2006-1 and2006-2, extend through memory stack 2011 to expose substrate 2002. Aplurality of channel structures 2004 are arranged in a memory blockbetween GLSs 2006-1 and 2006-2. Due to deformation, a lateral dimension,e.g., diameter D, of a GLS (e.g., 2006-1 or 2006-2) varies along thevertical direction (e.g., the z-direction), causing the memory block andchannel structures 2004 to move from their desired position/orientation.These deformations can lead to photolithography misalignment andelectrical leakage in subsequent fabrication processes that form ACSs inthe GLSs.

The present disclosure provides 3D memory devices (e.g., 3D NAND memorydevices) having source structures with reduced resistance, and methodsfor forming the 3D memory devices. For example, an exemplary 3D memorydevice employs one or more support structures that divide a slitstructure into a plurality of slit openings, in which source contactsare formed. The support structures are each in contact with adjacentmemory blocks, providing support to the entire structure of the 3Dmemory device during the formation of conductor layers/portions andsource contacts. The 3D memory device is then less susceptible todeformation or damages during the fabrication process.

In an exemplary 3D memory device disclosed herein, at least two of thesource contacts separated by a support structure are conductivelyconnected to each other through an adhesion layer. An adhesion layer(also known as a “liner layer” or a “glue layer”) is an intermediarylayer over which a primary layer is formed. Application of an adhesionlayer can improve the adhesion of the primary layer. An adhesion layercan be deposited prior to the deposition of the primary layer to enhanceadhesion of the primary layer, such as an ACS. An adhesion layer mayinclude multiple sub-layers.

An adhesion layer is conductive and can include metals (e.g., titanium(Ti), tantalum (Ta), chromium (Cr), tungsten (W), etc.), metal compounds(e.g., titanium nitride (TiNx), tantalum nitride (TaNx), chromiumnitride (CrNx), tungsten nitride (WNx), etc.), and/or metal alloys(e.g., TiSixNy, TaSixNy, CrSixNy, WSixNy, etc.). The specificmaterial(s) of the adhesion layer may be determined based on thematerial of the primary layer (e.g., W or Cu). In some embodiments, thespecific material(s) of the adhesion layer may be determined based onthe base layer/substrate (e.g., the layer over which the adhesion layeris deposited, including silicon, dielectrics, metals, etc.). An adhesionlayer functions as a conductive link electrically connecting the atleast two source contacts. Instead of applying a source voltage on eachof the plurality of source contacts using a respective contact plug, thesource voltage can be applied to any one of the source contacts that areelectrically connected together by one or more adhesion layers. As aresult, fewer contact plugs are needed to apply the source voltage,reducing the resistance of the source structure. The contact areabetween the adhesion layer and a source contact can be sufficientlylarge to further reduce the resistance of the source structure. In someembodiments, the adhesion layer is in contact with and conductivelyconnected to all of the source contacts in a source structure, furtherreducing the resistance of the source structure.

In some embodiments, the adhesion layer may also serve as the barrierlayer, which can mitigate the metal atoms of the primary layer (e.g.,Cu) out-diffusion directly into the device, or indirectly (e.g., throughan insulating or a dielectric layer) into the device.

FIG. 1 illustrates a plan view of an exemplary 3D memory device 100,according to some embodiments. FIG. 2A illustrates a cross-sectionalview of the 3D memory device 100 shown in FIG. 1 along the C-Ddirection. FIG. 2B illustrates a cross-sectional view of the 3D memorydevice 100 shown in FIG. 1 along the A-B direction. As shown in FIG. 1,3D memory device 100 may include a core region in which one or more,e.g., a pair of, source regions 22 extending along the x-direction. Asource structure may be formed in each source region 22. One or moreblock regions 21, in which a plurality of memory cells are formed, maybe between the pair of source regions 22. A memory block may be formedin each block region 21.

As shown in FIGS. 1, 2A, and 2B, 3D memory device 100 may include asubstrate 102, and a stack structure 111 over substrate 102. In blockregions 21, stack structure 111 (also referred to as “memory stack”) mayinclude a plurality of conductor layers 123 and a plurality ofinsulating layers 124 interleaved over substrate 102. Stack structure111 may also include a dielectric cap layer 125 covering the pluralityof conductor layers 123 and insulating layers 124. In block regions 21,stack structure 111 may also include a plurality of channel structures110 extending from dielectric cap layer 125 into substrate 102 along avertical direction (e.g., the z-direction). Each channel structure 110may include an epitaxial portion at a bottom portion, a drain structureat a top portion, and a semiconductor channel between the epitaxialportion and the drain structure. The semiconductor channel may include amemory film, a semiconductor layer, and a dielectric core. The epitaxialportion may be in contact with and conductively connected to substrate102. The semiconductor channel may be in contact with and conductivelyconnected to the drain structure and the epitaxial portion. A pluralityof memory cells may be formed by the semiconductor channels and controlconductor layers.

A source structure may be formed in source region 22 to extend along thex-direction. The source structure may include a plurality of sections,each including a source contact (e.g., 104/104′). The plurality ofsections or source contacts may be separated by one or more supportstructures (e.g., 220). As used herein, two sections/source contacts areseparated by a support structure when the two sections/source contactsare physically separated (e.g., no direct physical contact) by thesupport structure. The two sections/source contacts, however, may beconductively (e.g., electrically) connected with each other through aconductive link, which may conductively connect to each of the twosections/source contacts either directly (e.g., through physicalcontact) or indirectly (e.g., through one or more further conductivemedia). Embodiments of the present application disclose variousconductive links conductively connecting multiple physically separatedsections/source contacts such that a single contact plug can supplysource voltage to multiple sections/source contacts conductivelyconnected together.

A plurality of source contacts (e.g., 104, 104′) formed in the samesource region 22 (e.g., within the same source structure) may be alignedalong the x-direction. Each source structure may extend vertically(along z-direction) through stack structure 111 and contact substrate102. A source voltage can be applied to the memory cells through thesource structure and substrate 102.

3D memory device 100 may include one or more support structures 220aligned along the x-direction and dividing a source structure into theplurality of sections, each section including a source contact (e.g.,104/104′). In some embodiments, support structure 220 includes a caplayer 115, a cut layer 114, and a portion stack 221. Portion stack 221may include interleaved a plurality of conductor portions 223 andinsulating portions 224 over substrate 102. Support structure 220 may bein contact with adjacent memory blocks (or block regions 21) along they-direction, and separate adjacent source contacts (e.g., 104, 104′)along the x-direction. Support structure 220 may provide support to 3Dmemory device 100 during the formation of the source structures andconductor layers 123. Each section of the source structure may furtherinclude a connection layer (e.g., 108/108′) over a source contact (e.g.,104/104′) and conductively connected to the corresponding sourcecontact. Adjacent connection layers (e.g., 108 and 108′) may beseparated by support structure 220 that also separates the respectivesource contacts (e.g., 104 and 104′). In some embodiments, sourcevoltage may be applied to a source contact (e.g., 104) through itscorresponding connection layer (e.g., 108). In some embodiments,multiple connection layers (e.g., 108, 108′) may be conductivelyconnected through, for example, cut layer 114 and/or an adhesion layer232 (e.g., adhesion layer 232 may contain multiple adhesion portions 232a-232 g). In this way, physically separated source contacts/connectionlayers (e.g., within their respective sections) can be conductivelyconnected together, enabling the application of the source voltage tomultiple connected source contacts through a single contact plug. Theresistance of the source structure can be reduced compared to applyingthe source voltage onto each source contact using a separate contactplug. Details of each structure illustrated in FIGS. 1, 2A, and 2B aredescribed below.

Substrate 102 can include silicon (e.g., single crystalline silicon),silicon germanium (SiGe), gallium arsenide (GaAs), germanium (Ge),silicon on insulator (SOI), germanium on insulator (GOI), or any othersuitable materials. In some embodiments, substrate 102 is a thinnedsubstrate (e.g., a semiconductor layer), which was thinned by grinding,etching, chemical mechanical polishing (CMP), or any combinationthereof. In some embodiments, substrate 102 includes silicon.

Channel structures 110 may form an array and may each extend verticallyabove substrate 102. Channel structure 110 may extend through aplurality of pairs each including a conductor layer 123 and aninsulating layer 124 (also referred to as “conductor/insulating layerpairs”). At least on one side along a horizontal direction (e.g.,x-direction and/or y-direction), stack structure 111 can include astaircase structure (not shown). The number of the conductor/insulatinglayer pairs in stack structure 111 (e.g., 32, 64, 96, or 128) maydetermine the number of memory cells in 3D memory device 100. In someembodiments, conductor layers 123 and insulating layers 124 in stackstructure 111 are alternatingly arranged along the vertical direction inblock regions 21. Conductor layers 123 can include conductive materialsincluding, but not limited to, tungsten (W), cobalt (Co), copper (Cu),aluminum (Al), polysilicon, doped silicon, silicide, or any combinationthereof. Insulating layers 124 can include dielectric materialsincluding, but not limited to, silicon oxide, silicon nitride, siliconoxynitride, or any combination thereof. In some embodiments, conductorlayers 123 may include a top conductor layer having a plurality of topselect conductor layers, and a bottom conductor layer having a pluralityof bottom select conductor layers. The top select conductor layers mayfunction as the top select gate electrodes, and the bottom selectconductor layers may function as the bottom select gate electrodes.Conductor layers 123 between the top and bottom conductor layers mayfunction as select gate electrodes and form memory cells withintersecting channel structures 110. Top select gate electrodes andbottom select gate electrodes can respectively be applied with desiredvoltages to select a desired memory block/finger/page.

Channel structure 110 can include a semiconductor channel extendingvertically through stack structure 111. The semiconductor channel caninclude a channel hole filled with a channel-forming structure, e.g.,semiconductor materials (e.g., as a semiconductor layer) and dielectricmaterials (e.g., as a memory film). In some embodiments, thesemiconductor layer includes silicon, such as amorphous silicon,polysilicon, or single crystalline silicon. In some embodiments, thememory film is a composite layer including a tunneling layer, a memorylayer (also known as a “charge trap layer”), and a blocking layer. Theremaining space of the channel hole of the semiconductor channel can bepartially or fully filled with a dielectric core including dielectricmaterials, such as silicon oxide. The semiconductor channel can have acylinder shape (e.g., a pillar shape). The dielectric core,semiconductor layer, the tunneling layer, the memory layer, and theblocking layer are arranged radially from the center toward the outersurface of the pillar in this order, according to some embodiments. Thetunneling layer can include silicon oxide, silicon oxynitride, or anycombination thereof. The memory layer can include silicon nitride,silicon oxynitride, silicon, or any combination thereof. The blockinglayer can include silicon oxide, silicon oxynitride, high dielectricconstant (high-k) dielectrics, or any combination thereof. In oneexample, the memory layer can include a composite layer of siliconoxide/silicon oxynitride (or silicon nitride)/silicon oxide (ONO).

In some embodiments, channel structure 110 further includes an epitaxialportion (e.g., a semiconductor plug) in the lower portion (e.g., at thelower end of bottom) of channel structure 110. As used herein, the“upper end” of a component (e.g., channel structure 110) is the endfarther away from substrate 102 in the vertical direction (z-direction),and the “lower end” of the component (e.g., channel structure 110) isthe end closer to substrate 102 in the vertical direction when substrate102 is positioned in the lowest plane of 3D memory device 100. Theepitaxial portion can include a semiconductor material, such as silicon,which is epitaxially grown from substrate 102 in any suitabledirections. It is understood that in some embodiments, the epitaxialportion includes single crystalline silicon, the same material assubstrate 102. In other words, the epitaxial portion can include anepitaxially-grown semiconductor layer grown from substrate 102. Theepitaxial portion can also include a different material than substrate102. In some embodiments, the epitaxial portion includes at least one ofsilicon, germanium, and silicon germanium. In some embodiments, part ofthe epitaxial portion is above the top surface of substrate 102 and incontact with the semiconductor channel. The epitaxial portion may beconductively connected to the semiconductor channel. In someembodiments, a top surface of the epitaxial portion is located between atop surface and a bottom surface of a bottom insulating layer 124 (e.g.,the insulating layer at the bottom of stack structure 111).

In some embodiments, channel structure 110 further includes a drainstructure (e.g., channel plug) in the upper portion (e.g., at the upperend) of channel structure 110. The drain structure can be in contactwith the upper end of a semiconductor channel and may be conductivelyconnected to the semiconductor channel. The drain structure can includesemiconductor materials (e.g., polysilicon) or conductive materials(e.g., metals). In some embodiments, the drain structure includes anopening filled with Ti/TiN or tantalum/tantalum nitride (Ta/TaN) as anadhesion layer and tungsten as a conductor material. By covering theupper end of semiconductor channel during the fabrication of 3D memorydevice 100, the drain structure can function as an etch stop layer toprevent etching of dielectrics filled in the semiconductor channel, suchas silicon oxide and silicon nitride.

As shown in FIGS. 1, 2A, and 2B, a source structure can be formed insource region 22. The source structure, aligned along the x-direction,may include a plurality of sections each including a source contact(e.g., 104/104′). The plurality of sections/source contacts may beseparated by one or more support structures (e.g., 220). Each sourcecontact (e.g., 104/104′) may be in contact with and conductivelyconnected to substrate 102. An insulating structure (not shown) may beformed between a source contact and an adjacent memory block to insulatethe respective source contact from conductor layers 123 in the adjacentmemory block in block region 21. In some embodiments, source contact104/104′ includes at least one of polysilicon, aluminum, cobalt, copper,tungsten, or silicide. The insulating structure can include a suitabledielectric material, such as one or more of silicon oxide, siliconnitride, and silicon oxynitride.

The source structure may also include one or more support structures(e.g., 220) distributed along the x-direction. In some embodiments, eachsource structure includes at least one support structure (e.g., 220)dividing the respective source structure into a plurality ofsections/source contacts (e.g., 104 and 104′). For example, a firstsource contact 104 in a first section is separated from a second (e.g.,adjacent) source contact 104′ in a second section by support structure220.

In some embodiments, the source structure may include an adhesion layer232 between various components of the source structure. For example,adhesion layer 232 may include a plurality of adhesion portions 232a-232 g, as shown in FIG. 2A. Portion 232 a may be between sourcecontact 104 and support structure 220. For example, portion 232 a may bein contact with source contact 104 and conductively connect sourcecontact 104 with other portions of adhesion layer 232. Similarly,portion 232 b may be between source contact 104′ and support structure220. Portion 232 b may be in contact with source contact 104′ andconductively connect source contact 104′ with other portions of adhesionlayer 232. In some embodiments, portion 232 c may establish a conductivelink between source contacts 104 and 104′. For example, portion 232 cmay extend through support structure 220 and conductively connectportions 232 a and 232 b. Portion 232 c may be between cut layer 114 andportion stack 221. In this way, source contacts 104 and 104′ can beconductively connected to each other through portions of adhesion layer232 (e.g., portions 232 a, 232 c, and 232 b) between source contacts 104and 104′.

In some embodiments, source contact 104 and 104′ may conductivelyconnect to each other via other portions or other combinations ofportions of adhesion layer 232. For example, portion 232 f may bebetween connection layer 108 and source contact 104. Portion 232 f maybe in contact with connection layer 108 and source contact 104 andconductively connect connection layer 108 and source contact 104. Inthis way, source contact 104 may conductively connect with othercomponents of the source structure through connection layer 108 and/orportion 232 f. Similarly, portion 232 g may be between connection layer108′ and source contact 104′. Portion 232 g may be in contact withconnection layer 108′ and source contact 104′ and conductively connectconnection layer 108′ and source contact 104′. Source contact 104′ canbe conductively connected to other components of the source structurethrough connection layer 108′ and/or portion 232 g.

Portion 232 f and/or connection layer 108 may conductively connect toportion 232 g and/or connection layer 108′ through a variety of ways.For example, portion 232 c extending through support structure 220 mayestablish a conductive link between 108/232 f and 108′/232 g, as portion232 c may be in contact with 108/232 f and with 108′/232 g. In otherwords, portions 232 f, 232 c, and 232 g may be parts of the sameadhesion layer 232. In another example, cut layer 114 may establish aconductive link between 108/232 f and 108′/232 g. For instance, portion232 d may be between connection layer 108 and cut layer 114 and incontact with connection layer 108 and cut layer 114. Therefore,connection layer 108 may be conductively connected to cut layer 114through portion 232 d. Similarly, portion 232 e may be betweenconnection layer 108′ and cut layer 114 and in contact with connectionlayer 108′ and cut layer 114. Therefore, connection layer 108′ may beconductively connected to cut layer 114 through portion 232 e. In thisway, connection layers 108 and 108′ may be conductively connected witheach other through portion 232 d, cut layer 114, and portion 232 e.Alternatively or additionally, connection layers 108 and 108′ may beconductively connected with each other through portions 232 d, 232 c,and 232 e. Because adhesion layer 232, cut layer 114, and sourcecontacts 104 and 104′ are all conductive, source contacts 104 and 104′,while physically separated by support structure 220, can be conductivelyconnected to each other through any suitable combinations of adhesionportions 232 a-232 g, cut layer 114, and/or connection layers 108 and108′ that form conductive paths across support structure 220, therebyconductively linking the conductive components on both sides of supportstructure 220.

In some embodiments, connection layers 108/108′, cut layer 114, and/orsource contacts 104/104′ may include one or more conductive materials,including, for example, at least one of tungsten, cobalt, aluminum,copper, silicide, or polysilicon. For example, in some embodiments, cutlayer 114 may include polysilicon. In another example, connection layers108 and 108′ may include tungsten.

In some embodiments, cut layer 114 may include dielectric material(s)such as silicon oxide. In this case, the conductive link across supportstructure 220 may be established by adhesion layer 232 (e.g., throughportion 232 c).

In some embodiments, cap layer 115 may be over cut layer 114. Cap layer115 may include a dielectric material such as silicon oxide. In someembodiments, cap layer 115 may be in contact with cut layer 114. Asshown in FIG. 2A, cap layer 115 and cut layer 114 may be betweenconnection layers 108 and 108′ and separate connection layers 108 and108′. In some embodiments, portions 232 d and 232 e may extendvertically along support structure 220 such that portion 232 d isbetween connection layer 108 and cap layer 115, and portion 232 e isbetween connection layer 108′ and cap layer 115. In some embodiments, anupper surface of cap layer 115 and an upper surface of connection layer108 or 108′ may be coplanar.

Support structure 220 may be in contact with portions of stack structure111 in adjacent block regions 21. In some embodiments, portion stack 221may include interleaved a plurality of conductor portions 223 and aplurality of insulating portions 224. In some embodiments, each of theplurality of conductor portions 223 may be in contact with acorresponding conductor layer in a memory block in block regions 21adjacent to the source structure. Each of the plurality of insulatingportions may be in contact with a corresponding insulating layer in amemory block in block regions 21 adjacent to the source structure.

In some embodiments, a width d1 of cut layer 114 along the x-directionmay be nominally equal to a width d2 of the support structure underportion 232 c. In some embodiments, support structure 220 includes aspacer layer 225 under cut layer 114 and in contact with the interleavedconductor portions 223 and insulating portions 224 (e.g., surroundingportion stack 221). Spacer layer 225 may include a dielectric materialto provide insulation between portion stack 221 and adjacent sourcecontacts 104 and 104′.

At least two source contacts (e.g., 104 and 104′) may be consecutivelyarranged along the x-direction or separately distributed along thex-direction. For example, the at least two source contacts (e.g., 104and 104′) may be separated by one or more other source contacts that arenot in contact with a connection layer (e.g., 108/108′) and/or adhesionlayer 232. In some embodiments, a connection layer may be over and incontact with each of the plurality of source contacts in a sourcestructure. In some embodiments, adhesion layer 232 may conductivelyconnect all source contacts in a source structure. One or more sourcecontacts (e.g., 104, 104′) may be applied with a source voltage throughthe respective connection layer (e.g., 108, 108′). In some embodiments,one or more connection layers (e.g., 108, 108′) may include multipleportions. The specific number of portions in connection layer 108/108′should be determined based on the design and/or fabrication of 3D memorydevice 100 and should not be limited by the embodiments of the presentdisclosure.

In some embodiments, cut layer 114 includes a suitable material that isdifferent from the sacrificial layers. During the gate replacementprocess to form conductor layers 123 and conductor portions 223, cutlayer 114 may retain from the etching of the sacrificial layers. Forexample, cut layer 114 may include one or more of tungsten, aluminum,cobalt, copper, polysilicon, and silicide, and sacrificial layers mayinclude silicon nitride. In some embodiments, conductor portions 223 mayinclude the same material as conductor layers 123 in adjacent blockregions 21, and insulating portions 224 may include the same material asinsulating layers 124 in adjacent block regions 21. For example,conductor portions 223 may include one or more of tungsten, aluminum,cobalt, copper, polysilicon, and silicide, and insulating portions 224may include one or more of silicon oxide, silicon nitride, and siliconoxynitride. In some embodiments, connection layer 108/108′ includes oneor more of tungsten, aluminum, cobalt, copper, polysilicon, andsilicide. In some embodiments, source contact 104/104′ includespolysilicon, and connection layer 108/108′ includes tungsten. In someembodiments, dielectric cap layer 125 includes silicon oxide. In someembodiments, adhesion layer 232 may include TiN to improve the adhesionand/or conductivity between connection layer (e.g., 108) and sourcecontact (e.g., 104) and/or between connection layer (e.g., 108) and cutlayer 114. In some embodiments, adhesion layer 232 may improve theadhesion between an insulating structure and a conductive structure(e.g., between source contact 104/104′ and support structure 220 (orspacer layer 225), between cut layer 114 and portion stack 221 (orspacer layer 225), and between connection layers 108/108′ and cap layer115).

3D memory device 100 can be part of a monolithic 3D memory device. Theterm “monolithic” means that the components (e.g., the peripheral deviceand memory array device) of the 3D memory device are formed on a singlesubstrate. For monolithic 3D memory devices, the fabrication encountersadditional restrictions due to the convolution of the peripheral deviceprocessing and the memory array device processing. For example, thefabrication of the memory array device (e.g., NAND channel structures)is constrained by the thermal budget associated with the peripheraldevices that have been formed or to be formed on the same substrate.

Alternatively, 3D memory device 100 can be part of a non-monolithic 3Dmemory device, in which components (e.g., the peripheral device andmemory array device) can be formed separately on different substratesand then bonded, for example, in a face-to-face manner. In someembodiments, the memory array device substrate (e.g., substrate 102)remains as the substrate of the bonded non-monolithic 3D memory device,and the peripheral device (e.g., including any suitable digital, analog,and/or mixed-signal peripheral circuits used for facilitating theoperation of 3D memory device 100, such as page buffers, decoders, andlatches; not shown) is flipped and faces down toward the memory arraydevice (e.g., NAND memory strings) for hybrid bonding. It is understoodthat in some embodiments, the memory array device substrate (e.g.,substrate 102) is flipped and faces down toward the peripheral device(not shown) for hybrid bonding, so that in the bonded non-monolithic 3Dmemory device, the memory array device is above the peripheral device.The memory array device substrate (e.g., substrate 102) can be a thinnedsubstrate (which is not the substrate of the bonded non-monolithic 3Dmemory device), and the back-end-of-line (BEOL) interconnects of thenon-monolithic 3D memory device can be formed on the backside of thethinned memory array device substrate.

FIG. 3A illustrates an exemplary pattern set 300 for forming the etchmasks used in the fabrication process. FIG. 3B illustrates an enlargedview of a unit 350 of the pattern set. Patterns in pattern set 300 maybe used in different stages of a fabrication process to form 3D memorydevice 100. In various embodiments, depending on the types ofphotoresist used in the patterning processes, patterns in pattern set300 may each be a part of an etch mask or a pattern for determining anetch mask. For example, if a negative photoresist is used forpatterning, the patterns in pattern set 300 may be used as a part ofetch masks; if a positive photoresist is used for patterning, thepatterns in pattern set 300 may be complementary patterns fordetermining etch masks. It should be noted that the shapes, dimensions,and ratios shown in FIGS. 3A and 3B are for illustrative purposes andare not to scale.

As shown in FIG. 3A, pattern set 300 includes patterns 302, 306, and308. Specifically, pattern 302 may be used for patterning slit openingsof a slit structure, pattern 306 may be used for patterning a cutstructure from which cut layer 114 is formed, and pattern 308 may beused for forming contact plugs connecting connection layer 108/108′ anda peripheral circuit. Pattern set 300 may include a plurality ofrepeating units for the formation of a cut structure, the slit openings,and connection layer 108. FIG. 3B illustrates a repeating unit 350 thatshows the details, e.g., coverage, of each pattern. As shown in FIG. 3B,along the x-direction, a length D1 of pattern 306 (for forming the cutstructure) may be less than, equal to, or greater than a length D2 ofpattern 302 (for forming slit openings). For example, if the cutstructure is employed as an etch mask to form the slit openings, lengthD1 may be less than, greater than, or equal to length D2, and a width W1of pattern 306 may be greater than a width W2 of pattern 302; if aseparate etch mask (e.g., pattern 302) is employed as an etch mask toform the slit openings, length D1 may be greater than or equal to lengthD2 and width W1 may be less than, equal to, or greater than width W2. Insome embodiments, D1>D2 and W1<W2. The combination of D1, D2, W1, and W2in patterns 306 and 302 may ensure the cut structure (or supportstructure 220) is in contact with adjacent block regions 21 and havedesired dimensions in x-y plane, and should not be limited by theembodiments of the present disclosure.

FIGS. 4A and 4B illustrate a flowchart of an exemplary fabricationprocess 400 to form 3D memory device 100, and FIGS. 5-19 illustrate thefabrication process 400, according to some embodiments. FIGS. 4A and 4Bwill be discussed together with FIGS. 5-19 to describe the fabricationprocess. As shown in FIGS. 4A and 4B, fabrication process 400 includesoperations 402-430. Some of the operations may be omitted, and theoperations may be performed in a different order than the one shown inFIGS. 4A and 4B. Some operations may be performed simultaneously (e.g.,in the same operation(s) of the fabrication process).

At operation 402, one or more cut openings are formed in a stackstructure. FIG. 5 illustrates an exemplary cut opening 510 formed in anexemplary stack structure 111. Stack structure 111 may have a dielectricstack of interleaved initial sacrificial layers 533 and initialinsulating layers 534 formed over a substrate 102. Initial sacrificiallayers 533 may be used for subsequent formation of conductor layers 123.Initial insulating layers 534 may be used for subsequent formation ofinsulating layers 124. In some embodiments, stack structure 111 includesa first dielectric cap layer on the top surface of stack structure 111.

Stack structure 111 may have a staircase structure. The staircasestructure can be formed by repetitively etching a material stack thatincludes a plurality of interleaved sacrificial material layers andinsulating material layers using an etch mask, e.g., a patterned PRlayer over the material stack. The interleaved sacrificial materiallayers and the insulating material layers can be formed by alternatinglydepositing layers of sacrificial material and layers of insulatingmaterial over substrate 102 until a desired number of layers is reached.The sacrificial material layers and insulating material layers can havethe same or different thicknesses. In some embodiments, a sacrificialmaterial layer and the underlying insulating material layer are referredto as a dielectric pair. In some embodiments, one or more dielectricpairs can form one level/staircase. During the formation of thestaircase structure, the PR layer is trimmed (e.g., etched incrementallyand inwardly from the boundary of the material stack, often from alldirections) and used as the etch mask for etching the exposed portion ofthe material stack. The amount of trimmed PR can be directly related(e.g., determinant) to the dimensions of the staircases. The trimming ofthe PR layer can be obtained using a suitable etch, e.g., an isotropicdry etch such as a wet etch. One or more PR layers can be formed andtrimmed consecutively for the formation of the staircase structure. Eachdielectric pair can be etched, after the trimming of the PR layer, usingsuitable etchants to remove a portion of both the sacrificial materiallayer and the underlying insulating material layer. The etchedsacrificial material layers and insulating material layers may forminitial sacrificial layers 533 and initial insulating layers 534. The PRlayer can then be removed.

The insulating material layers and sacrificial material layers may havedifferent etching selectivities during the subsequent gate-replacementprocess. In some embodiments, the insulating material layers and thesacrificial material layers include different materials. In someembodiments, the insulating material layers include silicon oxide, andthe deposition of insulating material layers include one or more ofchemical vapor deposition (CVD), atomic layer deposition (ALD), physicalvapor deposition (PVD), and sputtering. In some embodiments, thesacrificial material layers include silicon nitride, and the depositionof insulating material layers include one or more of CVD, PVD, ALD, andsputtering. In some embodiments, the etching of the sacrificial materiallayers and the insulating material layers include one or more suitableanisotropic etching process, e.g., dry etch.

Referring to FIG. 5, cut opening 510 may be formed in source region 22(FIG. 1). Pattern 306 may be used for patterning cut opening 510. Thedepth of cut opening 510 may be between the thicknesses of two initialsacrificial/insulating layer pairs and four initialsacrificial/insulating layer pairs. The depth value of cut opening 510is determined based on design and/or fabrication of 3D memory device 100and should not be limited by the embodiments of the present disclosure.In some embodiments, an anisotropic etching process, such as dry etch,is performed to remove a portion of stack structure 111 until a desireddepth is reached. In some embodiments, one or more selective etchingprocesses are used to remove the portion of stack structure 111 so thebottom surface of cut opening 510 can stop at a desired position (e.g.,on a top surface of a desired initial insulating layer 534 or initialsacrificial layer 533) along the z-direction. In some embodiments, cutopening 510 may be formed in the same operations as forming otherstructures in stack structure 111, such as an opening 520 for forming atop select gate (TSG) cut. Therefore, no extra operation is needed toform the cut opening 510.

At operation 404, a suitable dielectric material, such as silicon oxide,is deposited in the cut opening. FIG. 6 illustrates an exemplarydielectric material 610 that is deposited in cut opening 510. A suitabledeposition process, such as CVD, ALD, PVD, sputtering, or a combinationthereof, can be performed to deposit the dielectric material. In someembodiments, dielectric material 610 is deposited by ALD. Optionally, aplanarization process, e.g., CMP and/or recess etch, is performed toremove any excess material over stack structure 111. In someembodiments, cut opening 510 is sufficiently large in size thatdielectric material 610 is not filled up cut opening 510. On the otherhand, opening 520, which is smaller than cut opening 510, is filled upwith dielectric material 610 to form the TSG cut.

At operation 406, a sacrificial material is deposited over thedielectric material to fill up the cut opening. FIG. 7 shows anexemplary sacrificial material 710 deposited over dielectric material610 to fill up cut opening 510. In some embodiments, sacrificialmaterial 710 may include silicon nitride. Any suitable deposition methodcan be used to deposit sacrificial material 710 over dielectric material610.

At operation 408, part of the deposited sacrificial material is removedto form a cut structure that includes a sacrificial layer. For example,a planarization process, e.g., CMP and/or recess etch, is performed toremove any excess sacrificial material and/or dielectric material. FIG.8 shows stack structure 111 after the excess sacrificial and/ordielectric material are removed. A cut structure 810 is formed, whichincludes the remaining part of dielectric material 610 and the remainingpart of sacrificial material that forms sacrificial layer 814 Theseremaining parts together fill up the cut opening 510 (FIG. 5).

A plurality of channel structures 110 (FIG. 1) can be formed in blockregion 21 (FIG. 1) before or after the formation of cut structure 810.Channel structures 110 may be formed before the formation of conductorlayers 123. As an example, channel structures 110 are formed before theformation of cut structure 810. To form channel structures 110, aplurality of channel holes may be formed extending vertically throughstack structure 111. In some embodiments, a plurality of channel holesare formed through the interleaved initial sacrificial layers 533 andinitial insulating layers 534 (FIG. 5). The plurality of channel holesmay be formed by performing an anisotropic etching process, using anetch mask such as a patterned PR layer, to remove portions of stackstructure 111 and expose substrate 102. In some embodiments, at leastone channel hole is formed on each side of cut structure 810 along they-direction. In some embodiments, a plurality of channel holes areformed in each block region 21. A recess region may be formed at thebottom of each channel hole to expose a top portion of substrate 102 bythe same etching process that forms the channel hole above substrate 102and/or by a separate recess etching process. In some embodiments, asemiconductor plug is formed at the bottom of each channel hole, e.g.,over the recess region. The semiconductor plug may be formed by anepitaxial growth process and/or a deposition process. In someembodiments, the semiconductor plug is formed by epitaxial growth and isreferred to as the epitaxial portion. Optionally, a recess etch (e.g.,dry etch and/or wet etch) may be performed to remove excesssemiconductor material on the sidewall of the channel hole and/orcontrol the top surface of the epitaxial portion at a desired position.In some embodiments, the top surface of the epitaxial portion is locatedbetween the top and bottom surfaces of the bottom initial insulatinglayer 534.

In some embodiments, the channel holes are formed by performing asuitable etching process, e.g., an anisotropic etching process (e.g.,dry etch) and/or an isotropic etching process (wet etch). In someembodiments, the epitaxial portion includes single crystalline siliconis formed by epitaxially grown from substrate 102. In some embodiments,the epitaxial portion includes polysilicon formed by a depositionprocess. The formation of epitaxially-grown epitaxial portion caninclude, but not limited to, vapor-phase epitaxy (VPE), liquid-phaseepitaxy (LPE), molecular-beam epitaxy (MPE), or any combinationsthereof. The formation of the deposited epitaxial portion may include,but not limited by, CVD, PVD, and/or ALD.

In some embodiments, a semiconductor channel is formed over and incontact with the epitaxial portion in the channel hole. Semiconductorchannel can include a channel-forming structure that has a memory film(e.g., including a blocking layer, a memory layer, and a tunnelinglayer), a semiconductor layer formed above and connecting the epitaxialportion, and a dielectric core filling up the rest of the channel hole.In some embodiments, memory film is first deposited to cover thesidewall of the channel hole and the top surface of the epitaxialportion, and a semiconductor layer is then deposited over memory filmand above epitaxial portion. The blocking layer, memory layer, andtunneling layer can be subsequently deposited in this order using one ormore thin film deposition processes, such as ALD, CVD, PVD, any othersuitable processes, or any combination thereof, to form memory film. Thesemiconductor layer can then be deposited on the tunneling layer usingone or more thin film deposition processes, such as ALD, CVD, PVD, anyother suitable processes, or any combination thereof. In someembodiments, a dielectric core is filled in the remaining space of thechannel hole by depositing dielectric materials after the deposition ofthe semiconductor layer, such as silicon oxide.

In some embodiments, a drain structure is formed in the upper portion ofeach channel hole. In some embodiments, parts of memory film,semiconductor layer, and dielectric core on the top surface of stackstructure 111 and in the upper portion of each channel hole can beremoved by CMP, grinding, wet etching, and/or dry etching to form arecess in the upper portion of the channel hole so that a top surface ofsemiconductor channel may be between the top surface and the bottomsurface of the first dielectric cap layer. Drain structure then can beformed by depositing conductive materials, such as metals, into therecess by one or more thin film deposition processes, such as CVD, PVD,ALD, electroplating, electroless plating, or any combination thereof. Achannel structure 110 is thereby formed. A plurality of memory cells maysubsequently be formed by the intersection of the semiconductor channelsand the control conductor layers. Optionally, a planarization process,e.g., dry/wet etch and/or CMP, is performed to remove any excessmaterial on the top surface of stack structure 111.

Referring back to FIG. 4A, after the formation of the cut structure, acap material is deposited over the cut structure and the stack structurein operation 410. FIG. 9 shows a cap material 910 deposited over cutstructure 810 and stack structure 111. Cap material 910 may include anysuitable dielectric material, such as silicon oxide, and can bedeposited using processes such as CVD, ALD, PVD, sputtering, or acombination thereof.

In operation 412, portions of the deposited cap material and portions ofthe stack structure adjacent to the cut structure are removed to form aslit structure and at least one initial support structure dividing theslit structure into a plurality of slit opening. FIG. 10 shows anexemplary initial support structure 1010 including the remaining part ofcap material 910, the remaining part of cut structure 810 including theremaining part of sacrificial layer 814, and interleaved a plurality ofsacrificial portions 1023 and a plurality of insulating portions 1024.

As shown in FIG. 10, portions of stack structure 111 adjacent to cutstructure 810, together with any cap material deposited thereover, areremoved to form slit structure 1020, which is divided by initial supportstructure 1010 into slit openings 1004. Pattern 302 may be used forpatterning slit structure 1020. That is, portions of stack structure 111in source region 22 and adjacent to cut structure 810 are removed toform slit structure 1020. The remaining portion of cap material 910, theremaining portion of cut structure 810, and the underneath interleavedsacrificial portions 1023 and insulating portions 1024 (e.g., remainingportions of initial sacrificial layer 533 and initial insulating layer534 after the etching of slit structure 1020) may form the initialsupport structure 1010. The sacrificial portions 1023 and insulatingportions 1024 may each be in contact with sacrificial layers andinsulating layers (124) of the same level in adjacent block regions 21.One or more initial support structures may divide slit structure 1020into a plurality of slit openings 1004, each exposing substrate 102 andinterleaved sacrificial layers and insulating layers of adjacent blockregions 21. A suitable anisotropic etching process, e.g., dry etch, canbe performed to form slit structure 1020.

In some embodiments, pattern 302 may not be used for patterning slitstructure 1020 and cut structure 810 may be used as an etch mask toremove portions of stack structure 111 and form slit structure 1020.

Referring back to FIG. 4A, in operation 414, the sacrificial layer 814in cut structure 810 of each initial support structure, sacrificialportions 1023 in each initial support structure and the sacrificiallayers in each block region are removed. An isotropic etching process,e.g., wet etch, can be performed to remove sacrificial layer 814,sacrificial portions 1023, and sacrificial layers in the block regionsthrough slit openings 1004. An opening 1114 in the initial supportstructure can be formed after sacrificial layer 814 is removed. Inaddition, a plurality of lateral recesses may be formed in each blockregion 21 by the removal of the sacrificial layers, and a plurality ofrecess portions 1123 may be formed in each initial support structure bythe removal of the sacrificial portions 1023.

In operation 416, conductor portions are formed in each initial supportstructure through the slit openings. In addition, conductor layers areformed in a plurality of memory blocks. FIG. 12 illustrates an exemplarystructure 1200 after operation 416.

As shown in FIG. 12, the sacrificial portions in each initial supportstructure are replaced with a plurality of conductor portions 1223. Thesacrificial layers in each block region 21 are replaced with a pluralityof conductor layers 123 (referring back to FIG. 2B). A conductormaterial may be deposited to fill up the lateral recesses and recessportions, forming the plurality of conductor layers 123 in each blockregion and the plurality of conductor portions 1223 in each initialsupport structure. In some embodiments, a layer of conductor materialmay be deposited on the upper and/or lower surface of opening 1114 afteroperation 416, as shown in FIG. 12.

Referring to FIG. 4B, in operation 418, part of the conductor portionsis removed. FIG. 13 shows conductor portions 223 after the distal partsof conductor portions 1223 are removed by any suitable process, such asetching. A recess portion is formed on both sides of a conductor portion223. In some embodiments, the layer of conductor material deposited onthe upper/lower surface of opening 1114 may also be removed, as shown inFIG. 13.

In operation 420, a spacer layer is formed around the initial supportstructure. FIG. 14 shows an exemplary spacer layer 225 surrounding theinitial support structure. Spacer layer 225 may include a dielectricmaterial and may be deposited by at least one of CVD, PVD, ALD, andsputtering. In addition, portion stack 221, having a plurality ofinterleaved conductor portions 223 and insulating portions 224, may beformed.

In operation 422, an adhesion material is deposited over the spacerlayer and in the opening to form at least a portion of an adhesionlayer. FIG. 15 shows an exemplary adhesion layer 1510 deposited overspacer layer 225 and in opening 1114. For example, the adhesion materialcan be deposited around cap material 910, which includes the uppersurface of opening 1114. Part of adhesion layer 1510 may be used toimprove adhesion between the support structure and source contacts, aswell as providing a conductive link connecting the conductive componentsseparated by the support structure.

In operation 424, the opening in the initial support structure is filledby depositing a conductive material into the opening. FIG. 16 shows thedeposition of a conductive material 1610 into opening 1114, as well asslit openings 1004. The conductive material filled in opening 1114 mayform cut layer 114, as part of support structure 220.

In operation 426, one or more source contacts are formed, each in acorresponding slit opening. FIG. 17 shows that excess conductivematerials deposited in slit openings 1004 are removed, forming sourcecontacts 104/104′ in their respective slit openings. Source contacts104/104′ are adhered to spacer layer 225 by part of adhesion layer 1510.

In operation 428, an adhesion material may be further deposited over thesupport structure and the source contacts such that the depositedadhesion material is in contact with the adhesion layer and may expandthe adhesion layer. FIG. 18 shows an exemplary adhesion layer includingadhesion portions 232 a-232 g after adhesion material is deposited atportions 232 f, 232 d, 232 e, and 232 g. Portions 232 f, 232 d, 232 e,and 232 g may be in contact with portion 232 c and/or 232 h, which areparts of adhesion layer 1510. In this way, a conductive link betweensource contacts 104 and 104′ can be established through portions 232a-232 g of the adhesion layer.

In operation 430, a connection layer is formed over the depositedadhesion material in the slit openings. FIG. 19 shows the structure of3D memory device 100 after connection layers 108 and 108′ are formed andexcess portions, including portion 232 h of the adhesion layer, areremoved. A planarization process, e.g., CMP and/or recess etch, may beused such that the top surface of cap layer 115 and the top surfaces ofconnection layers 108/108′ are coplanar.

After the formation of the support structure and conductor layers, asource structure is formed in the slit structure. In some embodiments,connection layer 108/108′ includes tungsten and is deposited by one ormore of CVD, PVD, ALD, and sputtering. In some embodiments, the adhesionlayer includes TiN and is deposited by one or more of CVD, PVD, ALD, andsputtering.

In some embodiments, a 3D memory device includes a memory stack over asubstrate. The memory stack includes interleaved a plurality ofconductor layers and a plurality of insulating layers. The 3D memorydevice also includes a plurality of channel structures extendingvertically in the memory stack. The 3D memory device also includes asource structure extending in the memory stack. The source structureincludes a support structure dividing the source structure into firstand second sections. The source structure also includes an adhesionlayer. At least a portion of the adhesion layer extends through thesupport structure and conductively connects the first and secondsections.

In some embodiments, the adhesion layer includes a first portion betweenthe first section and the support structure, a second portion betweenthe second section and the support structure, and a third portion thatincludes the portion of the adhesion layer extending through the supportstructure. The first and second portions are conductively connected withthe third portion.

In some embodiments, the first section includes a first source contactthat is in contact with the first portion and the second sectionincludes a second source contact that is in contact with the secondportion.

In some embodiments, the first section includes a first connection layerover the first source contact and the second section includes a secondconnection layer over the second source contact. The support structureincludes a cut layer over the third portion of the adhesion layer. Thecut layer is between the first and second connection layers.

In some embodiments, at least one of the first connection layer, thesecond connection layer, or the cut layer includes at least one oftungsten, cobalt, aluminum, copper, silicide, or polysilicon.

In some embodiments, the adhesion layer includes a fourth portionbetween the first connection layer and the cut layer and a fifth portionbetween the second connection layer and the cut layer. The fourth andfifth portions are conductively connected with the third portion.

In some embodiments, the support structure includes a cap layer over andin contact with the cut layer. The cap layer is between the first andsecond connection layers and separates the first and second connectionlayers.

In some embodiments, the cap layer includes silicon oxide.

In some embodiments, an upper surface of the cap layer and an uppersurface of the first or second connection layer are coplanar.

In some embodiments, the fourth portion extends vertically along thesupport structure and between the first connection layer and the caplayer. The fifth portion extends vertically along the support structureand between the second connection layer and the cap layer.

In some embodiments, the adhesion layer includes a sixth portion betweenthe first connection layer and the first source contact a seventhportion between the second connection layer and the second sourcecontact. The sixth and seventh portions are conductively connected withthe third portion.

In some embodiments, along a lateral direction along which the sourcestructure extends, a width of the cut layer is nominally equal to awidth of the support structure under the third portion of the adhesionlayer.

In some embodiments, the first or second source contact includespolysilicon.

In some embodiments, the support structure includes interleaved aplurality of conductor portions and a plurality of insulating portions.

In some embodiments, each of the plurality of conductor portions is incontact with a corresponding conductor layer in a memory block adjacentto the source structure and each of the plurality of insulating portionsis in contact with a corresponding insulating layer in the memory blockadjacent to the source structure.

In some embodiments, the 3D memory device further includes a spacerlayer in contact with the interleaved plurality of conductor portionsand insulating portions.

In some embodiments, the adhesion layer comprises at least one of Ti,Ta, Cr, W, TiNx, TaNx, CrNx, WNx, TiSixNy, TaSixNy, CrSixNy, or WSixNy.

In some embodiments, the plurality of channel structures each includesan epitaxial portion in contact with and conductively connected to thesubstrate, a semiconductor channel in contact with and conductivelyconnected to the epitaxial portion, and a drain structure in contactwith and conductively connected to the semiconductor channel.

In some embodiments, a 3D memory device includes a memory stack over asubstrate. The memory stack includes interleaved a plurality ofconductor layers and a plurality of insulating layers. The 3D memorydevice also includes a plurality of channel structures extendingvertically in the memory stack and a plurality of source structuresextending in parallel along a lateral direction in the memory stack. Theplurality of source structures each includes a plurality of supportstructures arranged along the lateral direction and dividing the sourcestructure into a plurality of sections. Each source structure alsoincludes an adhesion layer. At least a portion of the adhesion layerextends through at least one of the support structures and conductivelyconnects at least two adjacent sections divided by the at least one ofthe support structures.

In some embodiments, the at least two adjacent sections each includes asource contact conductively connecting to the portion of the adhesionlayer extending through the at least one of the support structures.

In some embodiments, the 3D memory device further includes a pluralityof connection layers each over a corresponding source contact. At leasttwo of the plurality of connection layers are conductively connected tothe portion of the adhesion layer extending through the at least one ofthe support structures.

In some embodiments, the at least one of the support structures includesa cut layer over the portion of the adhesion layer extending through theat least one of the support structures. The cut layer separates the atleast two of the plurality of connection layers.

In some embodiments, at least a portion of the adhesion layer is betweenthe cut layer and one of the at least two of the plurality of connectionlayers.

In some embodiments, the at least one of the support structures includesa cap layer over and in contact with the cut layer. The cap layer isbetween the at least two of the plurality of connection layers.

In some embodiments, the cap layer includes silicon oxide.

In some embodiments, an upper surface of the cap layer and an uppersurface of one of the at least two of the plurality of connection layersare coplanar.

In some embodiments, along the lateral direction, a width of the cutlayer is nominally equal to a width of the at least one of the supportstructures under the portion of the adhesion layer extending through theat least one of the support structures.

In some embodiments, the source contacts include polysilicon.

In some embodiments, the at least one of the support structures includesinterleaved a plurality of conductor portions and a plurality ofinsulating portions.

In some embodiments, each of the plurality of conductor portions is incontact with a corresponding conductor layer in a memory block adjacentto the source structure including the at least one of the supportstructures. Each of the plurality of insulating portions is in contactwith a corresponding insulating layer in the memory block adjacent tothe source structure including the at least one of the supportstructures.

In some embodiments, the 3D memory device includes a spacer layer incontact with the interleaved plurality of conductor portions andinsulating portions.

In some embodiments, the adhesion layer includes at least one of Ti, Ta,Cr, W, TiNx, TaNx, CrNx, WNx, TiSixNy, TaSixNy, CrSixNy, or WSixNy.

In some embodiments, the plurality of channel structures each includesan epitaxial portion in contact with and conductively connected to thesubstrate, a semiconductor channel in contact with and conductivelyconnected to the epitaxial portion, and a drain structure in contactwith and conductively connected to the semiconductor channel.

In some embodiments, a method for forming a 3D memory device includesforming a cut structure in a stack structure. The cut structure includesa sacrificial layer. The method also includes removing portions of thestack structure adjacent to the cut structure to form a slit structureand an initial support structure. The initial support structure dividesthe slit structure into a plurality of slit openings. The method alsoincludes forming an opening in the initial support structure by removingthe sacrificial layer of the cut structure and forming a plurality ofconductor portions in the initial support structure through theplurality of slit openings. The method also includes depositing anadhesion material in the opening of the initial support structure. Thedeposited adhesion material forms at least a portion of an adhesionlayer extending through the initial support structure. The method alsoincludes filling the opening of the initial support structure to form asupport structure and forming a source contact in each of the pluralityof slit openings. At least two source contacts are conductivelyconnected to the adhesion layer.

In some embodiments, to form the cut structure, the method includesforming a cut opening in the stack structure and depositing a dielectricmaterial in the cut opening.

In some embodiments, forming the cut opening is in the same operationsas forming a top select gate (TSG) cut.

In some embodiments, to form the cut structure, the method includesdepositing a sacrificial material over the dielectric material to fillup the cut opening.

In some embodiments, to form the cut structure, the method includesremoving part of the deposited sacrificial material to form the cutstructure.

In some embodiments, after forming the cut structure, the method furtherincludes depositing a cap material over the cut structure and the stackstructure.

In some embodiments, the method further includes removing portions ofthe deposited cap material adjacent to the cut structure in the sameoperations that remove portions of the stack structure adjacent to thecut structure to form the slit structure and the initial supportstructure.

In some embodiments, to remove the portions of the stack structureadjacent to the cut structure to form the slit structure and the initialsupport structure, the method includes removing portions of the stackstructure adjacent to the cut structure along a lateral direction toform the slit structure that exposes the substrate.

In some embodiments, to form the plurality of conductor portions, themethod includes removing, through the plurality of slit openings, aplurality of sacrificial portions in the initial support structure toform a plurality recess portions and depositing a conductor material tofill up the plurality of recess portions to form the plurality ofconductor portions.

In some embodiments, removing the plurality of sacrificial portions inthe initial support structure is in the same operation that forms theopening in the initial support structure by removing the sacrificiallayer of the cut structure.

In some embodiments, the method further includes forming a spacer layeraround the initial support structure.

In some embodiments, the method further includes depositing an adhesionmaterial over the spacer layer. The deposited adhesion material formspart of the adhesion layer.

In some embodiments, to form the source contact, the method includesdepositing polysilicon to fill up the respective slit opening andremoving part of the deposited polysilicon to form the source contact.

In some embodiments, depositing polysilicon to fill up the respectiveslit opening is in the same operation that fills the opening of theinitial support structure to form the support structure.

In some embodiments, after forming the source contact, the methodfurther includes depositing an adhesion material over the source contactsuch that the deposited adhesion material is in contact with theadhesion layer.

In some embodiments, the method further includes forming a connectionlayer over the deposited adhesion material in each of the plurality ofslit openings, such that at least two of the connection layers areconductively connected to source contacts in at least two slit openings.

The foregoing description of the specific embodiments will so reveal thegeneral nature of the present disclosure that others can, by applyingknowledge within the skill of the art, readily modify and/or adapt forvarious applications such specific embodiments, without undueexperimentation, without departing from the general concept of thepresent disclosure. Therefore, such adaptations and modifications areintended to be within the meaning and range of equivalents of thedisclosed embodiments, based on the teaching and guidance presentedherein. It is to be understood that the phraseology or terminologyherein is for the purpose of description and not of limitation, suchthat the terminology or phraseology of the present specification is tobe interpreted by the skilled artisan in light of the teachings andguidance.

Embodiments of the present disclosure have been described above with theaid of functional building blocks illustrating the implementation ofspecified functions and relationships thereof. The boundaries of thesefunctional building blocks have been arbitrarily defined herein for theconvenience of the description. Alternate boundaries can be defined solong as the specified functions and relationships thereof areappropriately performed.

The Summary and Abstract sections may set forth one or more but not allexemplary embodiments of the present disclosure as contemplated by theinventor(s), and thus, are not intended to limit the present disclosureand the appended claims in any way.

The breadth and scope of the present disclosure should not be limited byany of the above-described exemplary embodiments, but should be definedonly in accordance with the following claims and their equivalents.

The invention claimed is:
 1. A three-dimensional (3D) memory device,comprising: a memory stack over a substrate, the memory stack comprisinginterleaved a plurality of conductor layers and a plurality ofinsulating layers; a plurality of channel structures extendingvertically in the memory stack; and a source structure extending in thememory stack, wherein the source structure comprises: a supportstructure dividing the source structure into first and second sections;and an adhesion layer, wherein at least a portion of the adhesion layerextends through the support structure and conductively connects thefirst and second sections.
 2. The 3D memory device of claim 1, whereinthe adhesion layer comprises: a first portion between the first sectionand the support structure; a second portion between the second sectionand the support structure; and a third portion that includes the portionof the adhesion layer extending through the support structure; whereinthe first and second portions are conductively connected with the thirdportion.
 3. The 3D memory device of claim 2, wherein: the first sectioncomprises a first source contact that is in contact with the firstportion; and the second section comprises a second source contact thatis in contact with the second portion.
 4. The 3D memory device of claim3, wherein: the first section comprises a first connection layer overthe first source contact; and the second section comprises a secondconnection layer over the second source contact; wherein: the supportstructure comprises a cut layer over the third portion of the adhesionlayer; and the cut layer is between the first and second connectionlayers.
 5. The 3D memory device of claim 4, wherein: along a lateraldirection along which the source structure extends, a width of the cutlayer is nominally equal to a width of the support structure under thethird portion of the adhesion layer.
 6. The 3D memory device of claim 1,wherein the adhesion layer comprises at least one of Ti, Ta, Cr, W,TiNx, TaNx, CrNx, WNx, TiSixNy, TaSixNy, CrSixNy, or WSixNy.
 7. Athree-dimensional (3D) memory device, comprising: a memory stack over asubstrate, the memory stack comprising interleaved a plurality ofconductor layers and a plurality of insulating layers; a plurality ofchannel structures extending vertically in the memory stack; and aplurality of source structures extending in parallel along a lateraldirection in the memory stack, wherein the plurality of sourcestructures each comprises: a plurality of support structures arrangedalong the lateral direction and dividing the source structure into aplurality of sections; and an adhesion layer, wherein at least a portionof the adhesion layer extends through at least one of the supportstructures and conductively connects at least two adjacent sectionsdivided by the at least one of the support structures.
 8. The 3D memorydevice of claim 7, wherein the at least two adjacent sections eachcomprises a source contact conductively connecting to the portion of theadhesion layer extending through the at least one of the supportstructures.
 9. The 3D memory device of claim 8, further comprising: aplurality of connection layers each over a corresponding source contact,wherein at least two of the plurality of connection layers areconductively connected to the portion of the adhesion layer extendingthrough the at least one of the support structures.
 10. The 3D memorydevice of claim 9, wherein the at least one of the support structurescomprises: a cut layer over the portion of the adhesion layer extendingthrough the at least one of the support structures, wherein the cutlayer separates the at least two of the plurality of connection layers.11. The 3D memory device of claim 10, wherein: along the lateraldirection, a width of the cut layer is nominally equal to a width of theat least one of the support structures under the portion of the adhesionlayer extending through the at least one of the support structures. 12.A method for forming a three-dimensional (3D) memory device, comprising:forming a cut structure in a stack structure, the cut structurecomprising a sacrificial layer; removing portions of the stack structureadjacent to the cut structure to form a slit structure and an initialsupport structure, the initial support structure dividing the slitstructure into a plurality of slit openings; forming an opening in theinitial support structure by removing the sacrificial layer of the cutstructure; forming a plurality of conductor portions in the initialsupport structure through the plurality of slit openings; depositing anadhesion material in the opening of the initial support structure, thedeposited adhesion material forming at least a portion of an adhesionlayer extending through the initial support structure; filling theopening of the initial support structure to form a support structure;and forming a source contact in each of the plurality of slit openings,at least two source contacts being conductively connected to theadhesion layer.
 13. The method of claim 12, wherein forming the cutstructure comprises: forming a cut opening in the stack structure; anddepositing a dielectric material in the cut opening.
 14. The method ofclaim 13, wherein forming the cut structure comprises: depositing asacrificial material over the dielectric material to fill up the cutopening.
 15. The method of claim 14, wherein forming the cut structurecomprises: removing part of the deposited sacrificial material to formthe cut structure.
 16. The method of claim 12, wherein forming theplurality of conductor portions comprises: removing, through theplurality of slit openings, a plurality of sacrificial portions in theinitial support structure to form a plurality recess portions; anddepositing a conductor material to fill up the plurality of recessportions to form the plurality of conductor portions.
 17. The method ofclaim 12, further comprising forming a spacer layer around the initialsupport structure.
 18. The method of claim 17, further comprisingdepositing an adhesion material over the spacer layer, the depositedadhesion material forming part of the adhesion layer.
 19. The method ofclaim 12, wherein forming the source contact comprises: depositingpolysilicon to fill up the respective slit opening; and removing part ofthe deposited polysilicon to form the source contact.
 20. The method ofclaim 19, further comprising: after forming the source contact,depositing an adhesion material over the source contact such that thedeposited adhesion material is in contact with the adhesion layer.